MEMS full name Micro Electromechanical System, MEMS. It refers to high-tech devices with a size of a few millimeters or even smaller. Its internal structure is generally on the order of micrometers or even nanometers. It is an independent intelligent system. It is mainly composed of three parts: sensor, actuator (actuator) and micro energy. MEMS involves a variety of disciplines and engineering technologies in physics, semiconductors, optics, electrical engineering, chemistry, materials engineering, mechanical engineering, medicine, information engineering and bioengineering, for intelligent systems, consumer electronics, wearable devices, smart homes. The field of synthetic biology and microfluidic technology of system biotechnology has opened up a wide range of uses. Common products include MEMS accelerometers, MEMS microphones, micro-motors, micro-pumps, micro-vibrators, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, etc. and their integrated products.
MEMS is an independent intelligent system that can be mass-produced. Its system size is a few millimeters or even smaller, and its internal structure is generally on the order of micrometers or even nanometers. For example, common MEMS products are typically 3mm & TImes; 3mm & TImes; 1.5mm, or even smaller.
MEMS will have broad application prospects in the national economy and military systems. The main civilian sectors are electronics, medical, industrial, automotive and aerospace systems.
The United States has developed MEMS and accelerometers and sensors for automotive anti-collision and fuel-saving, which can improve the safety of automobiles and save fuel by 10%. This alone US Department of Defense system can save billions of dollars in gas bills every year. The application of MEMS in aerospace systems can result in significant cost savings, increased system flexibility, and a revolution in aerospace systems. In military applications, the US Department of Defense Advanced Research Projects Agency is implementing micro-electromechanical systems for small inertial measurement devices for personal navigation, large-capacity data storage devices, small analytical instruments, medical sensors, fiber-optic network switches, and environmental and safety monitoring. Research on distributed unattended sensing and other aspects. The agency has demonstrated an MEMS-based accelerometer that withstands nearly 10.5 gravitational accelerations generated by artillery launches and provides an economical guidance system for non-guided munitions. The military applications of the envisioned MEMS are: chemical warfare alarms, enemy and enemy identification devices, smart skins, and distributed battlefield sensor networks.
The history of MEMS development
1. Editing MEMS is a result of the development of micro-sensors, and several breakthroughs have been made:
2.70s micro mechanical pressure sensor products come out
3. Silicon electrostatic micromotor was developed in the late 1980s.
4.90th inkjet print head, hard disk read/write head, silicon accelerometer and digital micro-mirror device, etc.
5. Fully demonstrated the huge application prospects of microsystem technology and its microsystems
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